Nrog rau txoj kev loj hlob ntawm Tuam Tshoj txoj kev lag luam semiconductor, txoj kev loj hlob ntawm cov khoom tseem ceeb rau cov txheej txheem cov cuab yeej tau dhau los ua ib qho tseem ceeb ntawm kev txhim kho cov khoom siv. Raws li kev hu xov tooj rau domestic semiconductor technology localization loj hlob muaj zog, ntau thiab ntau lub hwj huam yees hauv kev lag luam semiconductor yuav kov yeej. Raws li kev paub ntau xyoo hauv kev lag luam semiconductor, peb lub tuam txhab tau tsim lub hollow-shaft siab- ceev servo lub cev muaj zog rau adsorbing wafers hauv semiconductor txheej, tsim, thiab tu cov khoom siv. Lub cev muaj zog no muaj kev nrawm nrawm, ntau yam ceev, thiab kev ua haujlwm siab, thiab tau txais kev qhuas los ntawm cov neeg siv khoom hauv kev lag luam.
Daim ntawv thov ntawm hollow-shaft servo lub cev muaj zog:
Kev nthuav tawm thiab tsim cov khoom siv (txheej txheej, tsim): Cov cuab yeej tseem ceeb rau cov txheej txheem photolithography, tswj txheej txheej, raug, thiab tsim.
Ntxuav, txheej, tsim, thiab cov khoom siv tshem tawm zaj duab xis.
Haum rau kev ntxuav lub cev, ntxuav particle, thiab tshuaj tsuag txheej txheem.
Hollow Shaft Servo Tsav Khoom Specifications thiab Daim Ntawv Thov Cheeb Tsam:
750W / 1000W - 5000, 6000 rpm
Daim Ntawv Thov Cheeb Tsam (High- qauv kawg):
8-nti thiab 12-nti semiconductor khoom.
Cov txheej txheem xws li txheej, tsim, tu, thiab etching.
Qhov siab tshaj plaws acceleration tuaj yeem ncav cuag 50000 R / S² instantaneous acceleration.
Tshwj xeeb ncej kawg tsim kom ntseeg tau qhov qis tshaj ncej kawg load runout coefficient.
